Tables for Process Chains Details

Find below link for BW tables
http://wiki.sdn.sap.com/wiki/display/BI/Important+Tables+in+SAP+BI+(+NW2004)

RSCOMPTLOGOT - Process Chain Component

RSEVENTCHAIN Event Chain Processing Event Table
RSEVENTHEAD Header for the event chain
RSEVENTHEADT Header for the event chain
RSPCCHAIN Process chain details

RSPCCHAINATTR Attributes for a Process Chain
RSPCCHAINEVENTS Multiple Events with Process Chains
RSPCCHAINT Texts for Chain
RSPCCOMMANDLOG System Command Execution Logs (Process Chains)
RSPCLOGCHAIN Cross-Table Log ID / Chain ID
RSPCLOGS Application Logs for the Process Chains
RSPCPROCESSLOG Logs for the Chain Runs
RSPCRUNVARIABLES Variables for Process Chains for Runtime
RSPC_MONITOR Monitor individual process chains